1 5 µm process - meaning and definition. What is 1 5 µm process
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What (who) is 1 5 µm process - definition

SEMICONDUCTOR MANUFACTURING PROCESSES WITH A 1 ΜM MOSFET TECHNOLOGY NODE
1 um process; 1 μm process; 1 µm (semiconductor process); 1µm (semiconductor process)

1 µm process         
The 1 μm process refers to the level of MOSFET semiconductor process technology that was commercialized around the 1984–1986 timeframe, by leading semiconductor companies like NTT, NEC, Intel and IBM. It was the first process where CMOS was common (as opposed to NMOS).
6 µm process         
SEMICONDUCTOR MANUFACTURING PROCESSES WITH A 6 ΜM MOSFET TECHNOLOGY NODE
6 µm; 6 μm process; 6µm
The 6 µm process is the level of semiconductor process technology that was reached around 1974 by the leading semiconductor companies such as Intel.
1.5 µm process         
SEMICONDUCTOR MANUFACTURING PROCESSES WITH A 1.5 ΜM MOSFET TECHNOLOGY NODE
1.5 um process; 1.5 µm; 1.5 μm process; 1.5µm
The 1.5 μm process is the level of MOSFET semiconductor process technology that was reached around 19811982, by leading semiconductor companies such as Intel and IBM.

Wikipedia

1 µm process

The 1 μm process (1 micrometre process) is a level of MOSFET semiconductor process technology that was commercialized around the 1984–1986 timeframe, by leading semiconductor companies like NTT, NEC, Intel and IBM. It was the first process where CMOS was common (as opposed to NMOS).

The earliest MOSFET with a 1 μm NMOS channel length was fabricated by a research team led by Robert H. Dennard, Hwa-Nien Yu and F.H. Gaensslen at the IBM T.J. Watson Research Center in 1974.